TSMC tips e-beam

[y eye]

Latest News: TSMC tips e-beam details in two-horse litho race

Peter Clarke
EE Times Europe
(06/10/2009 8:18 AM EDT)

LONDON — "Foundry chip supplier Taiwan Semiconductor Manufacturing Co. Ltd. has not yet committed itself to extreme ultraviolet lithography (EUVL) as the next means of making integrated circuits. The company is still backing two horses in the race to the next lithography, EUVL and clustered electron-beam." ... http://www.eetimes.com/news/latest/showArticle.jhtml?articleID=217800500

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