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Author Topic: "22 nanometers and beyond"... Update: 10June9  (Read 1557 times)
y eye
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« on: June 10, 2009, 08:43:46 PM »


ASML tips roadmap for EUV litho production platform

BRUSSELS, Belgium ASML Holding NV (Veldhoven, The Netherlands) tipped a roadmap for the introduction of its first extreme ultraviolet (EUV) lithography machines at the IMEC Technology Forum.
http://www.eetimes.eu/217701736

Related news: ASML moves up in fab tool rankings
http://www.eetimes.eu/216500460


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