Brion rolls Tachyon SMO 22nm and beyond

[y eye]

Brion, which is owned by Dutch lithography vendor ASML Holding NV, rolled out this week a new product, Tachyon SMO, which promises to enable full co-optimization of source and mask.
According to the company, the product leverages proprietary illumination capabilities and scanner models from ASML to optimize the source simultaneously with all patterns on the mask.

New thread created here: http://www.maingearforums.com/showthread.php?3544-22nm-and-beyond
22nm and beyond...