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Author Topic: "22 nanometers and beyond"... Update 05June09  (Read 2786 times)
y eye
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« on: February 14, 2009, 12:21:28 AM »

ASML tips roadmap for EUV litho production platform

Peter Clarke
Page 1 of 2

BRUSSELS, Belgium "ASML Holding NV (Veldhoven, The Netherlands) tipped a roadmap for the introduction of its first extreme ultraviolet (EUV) lithography machines at the IMEC Technology Forum."
Full article: http://www.eetimes.com/news/latest/showArticle.jhtml;jsessionid=WD4JQ2WG2UUAAQSNDLPCKH0CJUNN2JVN?articleID=217701736
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« Last Edit: June 05, 2009, 08:59:32 PM by y eye » Logged

y eye
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« Reply #1 on: June 05, 2009, 09:03:14 PM »

update 05June09
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